Abstract: In this article, the effect of starting layer on the ferroelectric properties and reliability of HfO2-ZrO2-HfO2 (HZH) and ZrO2-HfO2-ZrO2 (ZHZ) superlattice (SL) films were systematically ...
CATMAT Lab, Department of Molecular Sciences and Nanosystems, Ca’ Foscari University Venice and INSTM RU of Venice, via Torino 155, I-30172 Venezia, Mestre, Italy ...