A new technical paper titled “Particle charging during pulsed EUV exposures with afterglow effect” was published by researchers at ASML, ISTEQ B.V., and Eindhoven University of Technology. “The ...

SiC is extensively used in microelectronic devices owing to its several unique properties. However, low yield and high cost of the SiC manufacturing process are the major challenges that must be ...

Identifying issues that actually affect yield is becoming more critical and more difficult at advanced nodes, but there is progress. Although they are closely related, yield management and process ...

How Does EUV Lithography Work? EUV Lithography is a state-of-the-art technology in chip manufacturing that uses highly energetic ultraviolet light to carve detailed patterns onto semiconductor ...

Fastmicro B.V. is a manufacturer of surface particle defect detection systems and equipment established over 15 years ago. The main product lines include sample surface particle defect scanning, ...

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Colloidal lithography is a nanofabrication technique that utilizes colloidal particles as masks for creating ordered nanostructures on substrates. This cost-effective and scalable method has gained ...

Fastmicro, an innovator in high-throughput (sub)micrometer surface particle measurement and contamination control solutions, has successfully closed a growth funding round with Value Creation Capital ...

Semiconductor chips are among the smallest and most detailed objects humans can manufacture. Shrinking the scale and upping the complexity is a fight against the limits of physics, and optical ...