SOME years ago, Arnot 1 directed attention to the fact that bombardment of a surface with positive ions resulted in the liberation of negative ions of the same species. Shortly afterwards, Sloane and ...
Pairs of negatively charged phosphate groups and positive magnesium ions represent a key structural feature of DNA and RNA embedded in water. Vibrations of phosphate groups have now been established ...
Utilizing Secondary Ion Mass Spectrometry (SIMS) for in-line metrology is a newly emerging method of process control that requires contamination-free measurements, enabling SIMS on product wafers.
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