Defect tracking tools store all data related to defects and are based on various algorithms that include identification, categorization, verification, and reporting. Features of Next Generation Defect ...
Venice, Florida — SoftJin, introduced NxDAT, a tool for the analysis of defects identified by mask inspection systems. The software includes features for defect navigation, visual display, defect ...
Metrology tool vendor Rudolph Technologies Inc. took the wraps off a suite of macro defect equipment today, claiming that it can produce real-time inspection on each critical lithography and wafer ...
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